Nanoimprint and Nanotransfer

Prof. Khaled Karrai is Chief Technical Officer and R&D head of attocube systems AG and was a TUM-IAS Rudolf Diesel Industry Fellow.

The focus of the one-year Fellowship was to explore new directions in the field of nanoimprinting and nanotransfer of materials by combining the expertise of attocube systems AG in positioning and control at the nanometer scale with the know-how developed in nanoimprinting by the TUM Institute for Nanoelectronics (NANO), which acts as host institute.
While nanoimprint was initially introduced with the motivation of providing an alternative to optical lithography in integrated circuits fabrication, it has in the meantime become clear that the demands and constrains posed by integrated circuit fabrications (alignment in the nanometer domain over several layers) cannot be met by nanoimprinting. A variety of new studies performed in recent years around the world have shown the potential of nanoimprinting techniques in field such as e.g. bioelectronics, renewable energy, sensors, and nanofabrication. At the Institute for Nanoelectronics the activity on nanoimprinting started few years ago to investigate the potential of nanoimprinting for patterning substrates used in the growth of nanowires, in the electroless deposition of metal nanoparticles, in the realization of subwavelength grating and in the fabrication of nanocontacts. In addition, the Institute for Nanoelectronics has concentrated on the development of innovative nanoimprinting techniques which have led to two patent applications and to several publications. A fruitful research collaboration between attocube systems AG and Institute for Nanoelectronics has started a couple of years ago, involving Diploma and PhD students active at both the university and company site. The Fellowship is strengthening the existing collaboration, extending its scope to teaching and outreach. A further objective of the Fellow is to set up new collaborations with other TUM institutes, to foster trans-disciplinary work and cross links within TUM and with the external institutions to extend the training offer in the field, and to enhance industry-related issues into the teaching activities of the Institute and in the outreach offer of IAS.

Prof. Wolfgang Porod is a Professor of Electrical Engineering at the University of Notre Dame, and was as a Hans Fischer Senior Fellow active in this TUM-IAS Focus Group.

TUM-IAS funded doctoral candidates:
Edgar-Otto Albert, NanoelectronicsMario Bareiß (PhD in 2012)
Armin Exner (PhD in 2014), Nanoelectronics
Qingqing Gong (PhD in 2015), Nanoelectronics
Muhammad Imtaar (PhD in 2014)
Klaus Thurner, Nanoelectronics
Anandi Yadav (PhD in 2014), Nanoelectronics

Publications by the Focus Group

2017

  • Bareiß, Mario; Hochmeister, Andreas; Jegert, Gunther; Koblmüller, Gregor; Zschieschang, Ute; Klauk, Hagen; Fabel, Bernhard; Scarpa, Giuseppe; Porod, Wolfgang; Lugli, Paolo: Nano Antennas for Energy Conversion. In: Nanoelectronic Device Applications Handbook. CRC Press, 2017 mehr…

2015

  • Gong, Qingqing: Fabrication and Characterization of Carbon Nanotube Random Network Transistors. Dissertation, 2015 mehr…

2014

  • Imtaar, Muhammad Atyab: Fabrication of nanomagnetic logic components via nanoimprint lithography. Dissertation, 2014 mehr…
  • Yadav, Anandi: Nanoimprinting Techniques for Polymeric Electronic Devices. Dissertation, 2014 mehr…

2013

  • BareiB, Mario; Krenz, Peter M.; Szakmany, Gergo P.; Tiwari, Badri N.; Kalblein, Daniel; Orlov, Alexei O.; Bernstein, Gary H.; Scarpa, Giuseppe; Fabel, Bernhard; Zschieschang, Ute; Klauk, Hagen; Porod, Wolfgang; Lugli, Paolo: Rectennas Revisited. IEEE Transactions on Nanotechnology 12 (6), 2013, 1144-1150 mehr…
  • Exner, Armin T.; Pavlichenko, Ida; Lotsch, Bettina V.; Scarpa, Giuseppe; Lugli, Paolo: Low-Cost Thermo-Optic Imaging Sensors: A Detection Principle Based on Tunable One-Dimensional Photonic Crystals. ACS Applied Materials & Interfaces 5 (5), 2013, 1575-1582 mehr…
  • Imtaar, Muhammad Atyab; Li, Peng; Varga, Edit; Csaba, Gyorgy; Bernstein, Gary H.; Scarpa, Giuseppe; Porod, Wolfgang; Lugli, Paolo: Nanomagnetic logic devices fabrication using nanoimprint lithography. 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013), IEEE, 2013 mehr…
  • Imtaar, Muhammad Atyab; Yadav, Anandi; Epping, Alexander; Becherer, Markus; Fabel, Bernhard; Rezgani, Jamila; Csaba, Gyorgy; Bernstein, Gary H.; Scarpa, Giuseppe; Porod, Wolfgang; Lugli, Paolo: Nanomagnet Fabrication Using Nanoimprint Lithography and Electrodeposition. IEEE Transactions on Nanotechnology 12 (4), 2013, 547-552 mehr…
  • Morkötter, Stefanie; Funk, Stefan; Liang, Mengyu; Döblinger, Markus; Hertenberger, Simon; Treu, Julian; Rudolph, Daniel; Yadav, Anandi; Becker, Jonathan; Bichler, Max; Scarpa, Giuseppe; Lugli, Paolo; Zardo, Ilaria; Finley, Jonathan J.; Abstreiter, Gerhard; Koblmüller, Gregor: Role of microstructure on optical properties in high-uniformity In1−xGaxAs nanowire arrays: Evidence of a wider wurtzite band gap. Physical Review B 87 (20), 2013 mehr…
  • Thurner, K.; Braun, P.F.; Karrai, K.: Distance metrology using a low-finesse fiber-optic Fabry-Pérot interferometer. Nanoscale 2013 Conference (Paris, France, April 2013), 2013Proceedings of the Nanoscale 2013 Conference (Paris, France, April 2013) mehr…
  • Thurner, Klaus; Braun, Pierre-François; Karrai, Khaled: Fabry-Pérot interferometry for long range displacement sensing. Review of Scientific Instruments 84 (9), 2013, 095005 mehr…
  • Thurner, Klaus; Braun, Pierre-François; Karrai, Khaled: Absolute distance sensing by two laser optical interferometry. Review of Scientific Instruments 84 (11), 2013, 115002 mehr…

2012

  • Berkovic, Garry; Shafir, Ehud: Optical methods for distance and displacement measurements. Advances in Optics and Photonics 4 (4), 2012, 441 mehr…
  • Pavlichenko, Ida; Exner, Armin T; Lugli, Paolo; Scarpa, Giuseppe; Lotsch, Bettina V: Tunable thermoresponsive TiO2/SiO2 Bragg stacks based on sol–gel fabrication methods. Journal of Intelligent Material Systems and Structures 24 (18), 2012, 2204-2214 mehr…